ALD/CVD Precursor-Thin Film Deposition for High k, metal gate and Low k

Full line electronic materials - your partner in high k, metal gate and low k

Since 1997, we have been offering our clients products from integrated circuits (IC), light-emitting diodes (LEDs) and photovoltaic (PV) manufacturers to materials for their thin film depostion. It's our mission to ensure our clients' success by enabling their production yield improvement and COO (Cost of Ownership) reduction.

We not only manufacture electronic-grade, high-purity, standard or tailored CVD (Chemical Vapor Deposition) and ALD (Atomic Layer Deposition) precursors, but also provide canister customization and valve cleaning and reclamation. To help our cients to stay ahead of the game, we concurrently develop innovative materials that ease their tranistion to the next generation production.

We are highly competent and experienced in meeting the requirements of top-tier global-scale semiductor fabs, and also stay agile and accessible to serve small/mid size clients.

Vertically integrated service: Front-end (synthesis, purification, analysis, manufacturing) to back-end (packaging, container, technical service, valve overhaul/cleaning)

BY APPLICATION

Application	Product Name	Purity
Dielectrics PMD/IMD	TEOS • TEPO • TMPO • TEB • TMB	>6N
Low K Dielectrics	• 4MS • OMCATS	>6N
High K Dielectrics	• TAETO (Ta2O5 Precursor ) • TEMAZ (ALD ZrO2 Precursor) • TMA (Al2O3 Precursor)	>6N
Metal Gate and Interconnect Metal	• TDMAT ( TiN Precursor ) • TiCl4 ( Ti /TiN Precursor )	>6N
Low-Temp Nitride/Oxide	• HCDS	>6N
Dopants	• POCl3	>6N

Note：All precursors can also be modified with many other functional groups and provided by Nanmat in IC grades (>6N)

CONTAINER & LEVEL SENSOR

Service Description

We are very familiar with most existing equipments' container specification. We work with our clients to scale up their container so they can minimize the change over time. Furthermore, by installing our USA patented on-line real-time sensing during bubbling and refilling, customers can monitor the precursor usage to eliminate the risk of run-out or waste of materials by pre-mature removal of the bubbler.

Feature

Scale up: Continuous supply of source metal-organics; steady state and reliable quality; improved process control and yield rate; reduction of the risk of system contamination during change-over; decreased Preventative Maintenance (PM) down time
Real time level sensing: easy planning for ampoule change and significant reduction of Cost of Ownership by constant monitoring of the material consumption

Sample Container

* Various valve types available

TDMAT

Size	Wt (Kg)	Material Name*	Remark
1.2 L	0.4 0.4 0.4	3C04-C1-FMMM-IE 3C04-C1-HMMM-IE 3C04-C1-LMMM-IE
3.8 L	3.5	3C04-D1-DMM510E

TEOS

Size	Wt (Kg)	Material Name*
5 Gal	17.4 17.4 17.4	3C01-L5-AMFS-D7 3C01-L5-HMFA-D7 3C01-L5-HMFS-DW
10 Gal	34.0 34.8 35.2	3C01-A9-HMFN-C7 3C01-K5-HMFA-W7 3C01-K9-PMFS-J7
53 Gal	180.0	3C04-C1-LMMM-IE

TEB

Size	Wt (Kg)	Material Name*	Remark
5 Gal	15.0	3C08-B5-HMFN-E7
5 Gal	15.75	3C08-B5-PMFS-L7

TEPO

Size	Wt (Kg)	Material Name*	Remark
5 Gal	15.0	3C09-B5-HMFN-E7
5 Gal	18.0	3C09-B5-HMFA-M7

TMPO

Size	Wt (Kg)	Material Name*	Remark
5 Gal	10.0 10.0 15.0	3C10-B5-AMFS-P7 3C10-B5-HMFS-PV 3C10-B5-HMFN-E7

TiCl4

Size	Wt (Kg)	Material Name*	Remark
5 Gal	25.0	3C12-M5-PMFN167

Buy Chemical Samples

With a picture and/or drawing of your current canister, we will find a compatible container to drop in your equipment. Our team is here to help with your specific requirements and will seek a way to improve your tool's productivity while very often saving the cost for you. We have served prominent semiconductor fabs and would like to have the opportunity to serve your company as well.
Please contact us to add a valuable option of your material supplier.

VALVE & PIPELINE RECLAMATION

Service Description

Reclaim and save! Many of our clients are enjoying the saving by reclaiming their tool valves and pipelines. We have reclaimed hundreds and thousands of used valves. How do we do it?

Cleaning: All the received parts will be disassembled for cleaning.
Refurbishing: Consumable parts will be examined and repaired. New parts replaced if necessary.
Inspection: 100% reclaimed valves will need to pass the leakage test. A test report will be attached to ensure the quality of the reclamation.

Feature

Safe: All the reclaimed parts will be labeled so you can re-use it as the same tool.
Save: Small savings add up. Trim your operation cost by constantly recycling your parts.
Tool Performance: You don't need to max out the life cycle of the valve to save the new part cost. The reclamation service allows you change your valves more frequently to assure the product yield.

Sample Valve Cleaning

Post-cleaning Leakage Rate

Part Number	Part Name	Envelope (scc/m)	Seat (scc/m)
3870-01306	VALVE AIR ACTUATED NC 1/4 VCR F-F 10 RA	Less than 10 -7	Less than 10 -7
0520-21148	GASLINE AMPOULE MANIFOLD VERIFLO	Less than 10 -7	Less than 10 -7
0050-20123	GAS LINE, REDUCED FTG AMPOULE IN CVD RGB	Less than 10 -7	Less than 10 -7
0050-25197	GAS LINE, REDUCED FTG AMPOULE OUT CVD RGB	Less than 10 -7	Less than 10 -7

Test Run

Why throw away your money?
Just mail us your used valves and pipelines, and we will offer 50% off for your 1st trial order. You will receive a leadage test report to ensure the valve or pipeline sets will work almost like a new part. We are specializing in parts for TDMAT, TEOS. TEPO etc. Feel free to inquire if we can reclaim the valves on your CVD/ALD equipment.

Full line electronic materials - your partner in high k, metal gate and low k