Since 1997, we have been offering our clients products from integrated circuits (IC), light-emitting diodes (LEDs) and photovoltaic (PV) manufacturers to materials for their thin film depostion. It's our mission to ensure our clients' success by enabling their production yield improvement and COO (Cost of Ownership) reduction.
We not only manufacture electronic-grade, high-purity, standard or tailored CVD (Chemical Vapor Deposition) and ALD (Atomic Layer Deposition) precursors, but also provide canister customization and valve cleaning and reclamation. To help our cients to stay ahead of the game, we concurrently develop innovative materials that ease their tranistion to the next generation production.
We are highly competent and experienced in meeting the requirements of top-tier global-scale semiductor fabs, and also stay agile and accessible to serve small/mid size clients.
Vertically integrated service: Front-end (synthesis, purification, analysis, manufacturing) to back-end (packaging, container, technical service, valve overhaul/cleaning)
| Application | Product Name | Purity |
|---|---|---|
| Dielectrics PMD/IMD | TEOS • TEPO • TMPO • TEB • TMB | >6N |
| Low K Dielectrics | • 4MS • OMCATS |
>6N |
| High K Dielectrics | • TAETO (Ta2O5 Precursor ) |
>6N |
| Metal Gate and Interconnect Metal | • TDMAT ( TiN Precursor ) • TiCl4 ( Ti /TiN Precursor ) |
>6N |
| Low-Temp Nitride/Oxide | • HCDS |
>6N |
| Dopants | • POCl3 | >6N |
Reclaim and save! Many of our clients are enjoying the saving by reclaiming their tool valves and pipelines. We have reclaimed hundreds and thousands of used valves. How do we do it?
Cleaning: All the received parts will be disassembled for cleaning.
| Part Number | Part Name | Envelope (scc/m) | Seat (scc/m) |
|---|---|---|---|
| 3870-01306 | VALVE AIR ACTUATED NC 1/4 VCR F-F 10 RA | Less than 10 -7 | Less than 10 -7 |
| 0520-21148 | GASLINE AMPOULE MANIFOLD VERIFLO | Less than 10 -7 | Less than 10 -7 |
| 0050-20123 | GAS LINE, REDUCED FTG AMPOULE IN CVD RGB | Less than 10 -7 | Less than 10 -7 |
| 0050-25197 | GAS LINE, REDUCED FTG AMPOULE OUT CVD RGB | Less than 10 -7 | Less than 10 -7 |
Why throw away your money? Just mail us your used valves and pipelines, and we will offer 50% off for your 1st trial order. You will receive a leadage test report to ensure the valve or pipeline sets will work almost like a new part. We are specializing in parts for TDMAT, TEOS. TEPO etc. Feel free to inquire if we can reclaim the valves on your CVD/ALD equipment.
NanoMate® 1810/1811 got GMW 16730 Certified
NanoMate® was granted with Taiwan Nano Mark
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